List of Abbreviations
| μCP | microcontact printing |
| 1-D | one-dimensional |
| 18-MEA | 18-methyl eicosanoic acid |
| 2-D | two-dimensional |
| 2-DEG | two-dimensional electron gas |
| 3-APTES | 3-aminopropyltriethoxysilane |
| 3-D | three-dimensional |
A
| a-BSA | anti-bovine serum albumin |
| a-C | amorphous carbon |
| A/D | analog-to-digital |
| AA | amino acid |
| AAM | anodized alumina membrane |
| ABP | actin binding protein |
| AC | alternating-current |
| AC | amorphous carbon |
| ACF | autocorrelation function |
| ADC | analog-to-digital converter |
| ADXL | analog devices accelerometer |
| AFAM | atomic force acoustic microscopy |
| AFM | atomic force microscope |
| AKD | alkylketene dimer |
| ALD | atomic layer deposition |
| AM | amplitude modulation |
| AMU | atomic mass unit |
| AOD | acoustooptical deflector |
| AOM | acoustooptical modulator |
| AP | alkaline phosphatase |
| APB | actin binding protein |
| APCVD | atmospheric-pressure chemical vapor deposition |
| APDMES | aminopropyldimethylethoxysilane |
| APTES | aminopropyltriethoxysilane |
| ASIC circuit | application-specific integrated |
| ASR | analyte-specific reagent |
| ATP | adenosine triphosphate |
B
| BAP | barometric absolute pressure |
| BAPDMA | behenyl amidopropyl dimethylamine glutamate |
| bcc | body-centered cubic |
| BCH | brucite-type cobalt hydroxide |
| BCS | Bardeen–Cooper–Schrieffer |
| BD | blu-ray disc |
| BDCS | biphenyldimethylchlorosilane |
| BE | boundary element |
| BFP | biomembrane force probe |
| BGA | ball grid array |
| BHF | buffered HF |
| BHPET | 1,1’-(3,6,9,12,15-pentaoxapentadecane- 1,15-diyl)bis(3-hydroxyethyl-1Himidazolium-1-yl) di[bis(trifluoromethanesulfonyl)imide] |
| BHPT | 1,1’-(pentane-1,5-diyl)bis(3- hydroxyethyl-1H-imidazolium-1-yl) di[bis(trifluoromethanesulfonyl)imide] |
| BiCMOS | bipolar CMOS |
| bioMEMS | biomedical microelectromechanical system |
| bioNEMS | biomedical nanoelectromechanical system |
| BMIM | 1-butyl-3-methylimidazolium |
| BP | bit pitch |
| BPAG1 | bullous pemphigoid antigen 1 |
| BPT | biphenyl-4-thiol |
| BPTC | cross-linked BPT |
| BSA | bovine serum albumin |
| BST | barium strontium titanate |
| BTMAC | behentrimonium chloride |
C
| CA | constant amplitude |
| CA | contact angle |
| CAD | computer-aided design |
| CAH | contact angle hysteresis |
| cAMP | cyclic adenosine monophosphate |
| CAS | Crk-associated substrate |
| CBA | cantilever beam array |
| CBD | chemical bath deposition |
| CCD | charge-coupled device |
| CCVD | catalytic chemical vapor deposition |
| CD | compact disc |
| CD | critical dimension |
| CDR | complementarity determining region |
| CDW | charge density wave |
| CE | capillary electrophoresis |
| CE | constant excitation |
| CEW | continuous electrowetting |
| CG | controlled geometry |
| CHO | Chinese hamster ovary |
| CIC | cantilever in cantilever |
| CMC | cell membrane complex |
| CMC | critical micelle concentration |
| CMOS | complementary metal–oxide–semiconductor |
| CMP | chemical mechanical polishing |
| CNF | carbon nanofiber |
| CNFET | carbon nanotube field-effect transistor |
| CNT | carbon nanotube |
| COC | cyclic olefin copolymer |
| COF | chip-on-flex |
| COF | coefficient of friction |
| COG | cost of goods |
| CoO | cost of ownership |
| COS | CV-1 in origin with SV40 |
| CP | circularly permuted |
| CPU | central processing unit |
| CRP | C-reactive protein |
| CSK | cytoskeleton |
| CSM | continuous stiffness measurement |
| CTE | coefficient of thermal expansion |
| Cu-TBBP | Cu-tetra-3,5 di-tertiary-butyl-phenyl porphyrin |
| CVD | chemical vapor deposition |
D
| DBR | distributed Bragg reflector |
| DC-PECVD | direct-current plasma-enhanced CVD |
| DC | direct-current |
| DDT | dichlorodiphenyltrichloroethane |
| DEP | dielectrophoresis |
| DFB | distributed feedback |
| DFM | dynamic force microscopy |
| DFS | dynamic force spectroscopy |
| DGU | density gradient ultracentrifugation |
| DI | FESPdigital instrument force modulation etched Si probe |
| DI | TESPdigital instrument tapping mode etched Si probe |
| DI | digital instrument |
| DI | deionized |
| DIMP | diisopropylmethylphosphonate |
| DIP | dual inline packaging |
| DIPS | industrial postpackaging |
| DLC | diamondlike carbon |
| DLP | digital light processing |
| DLVO | Derjaguin–Landau–Verwey–Overbeek |
| DMD | deformable mirror display |
| DMD | digital mirror device |
| DMDM | 1,3-dimethylol-5,5-dimethyl |
| DMMP | dimethylmethylphosphonate |
| DMSO | dimethyl sulfoxide |
| DMT | Derjaguin–Muller–Toporov |
| DNA | deoxyribonucleic acid |
| DNT | 2,4-dinitrotoluene |
| DOD | Department of Defense |
| DOE | Department of Energy |
| DOE | diffractive optical element |
| DOF | degree of freedom |
| DOPC | 1,2-dioleoyl-sn-glycero-3- phosphocholine |
| DOS | density of states |
| DP | decylphosphonate |
| DPN | dip-pen nanolithography |
| DRAM | dynamic random-access memory |
| DRIE | deep reactive ion etching |
| ds | double-stranded |
| DSC | differential scanning calorimetry |
| DSP | digital signal processor |
| DTR | discrete track recording |
| DTSSP | 3,3’-dithiobis(sulfosuccinimidylproprionate) |
| DUV | deep-ultraviolet |
| DVD | digital versatile disc |
| DWNT | double-walled CNT |
E
| EAM | embedded atom method |
| EB | electron beam |
| EBD | electron beam deposition |
| EBID | electron-beam-induced deposition |
| EBL | electron-beam lithography |
| ECM | extracellular matrix |
| ECR-CVD | electron cyclotron resonance chemical vapor deposition |
| ED | electron diffraction |
| EDC | 1-ethyl-3-(3-diamethylaminopropyl) carbodiimide |
| EDL | electrostatic double layer |
| EDP | ethylene diamine pyrochatechol |
| EDTA | ethylenediamine tetraacetic acid |
| EDX | energy-dispersive x-ray |
| EELS | electron energy loss spectra |
| EFM | electric field gradient microscopy |
| EFM | electrostatic force microscopy |
| EHD | elastohydrodynamic |
| EO | electroosmosis |
| EOF | electroosmotic flow |
| EOS | electrical overstress |
| EPA | Environmental Protection Agency |
| EPB | electrical parking brake |
| ESD | electrostatic discharge |
| ESEM | environmental scanning electron microscope |
| EU | European Union |
| EUV | extreme ultraviolet |
| EW | electrowetting |
| EWOD | electrowetting on dielectric |
F
| F-actin | filamentous actin |
| FA | focal adhesion |
| FAA | formaldehyde–acetic acid–ethanol |
| FACS | fluorescence-activated cell sorting |
| FAK | focal adhesion kinase |
| FBS | fetal bovine serum |
| FC | flip-chip |
| FCA | filtered cathodic arc |
| fcc | face-centered cubic |
| FCP | force calibration plot |
| FCS | fluorescence correlation spectroscopy |
| FD | finite difference |
| FDA | Food and Drug Administration |
| FE | finite element |
| FEM | finite element method |
| FEM | finite element modeling |
| FESEM | field emission SEM |
| FESP | force modulation etched Si probe |
| FET | field-effect transistor |
| FFM | friction force microscope |
| FFM | friction force microscopy |
| FIB-CVD | focused ion beam chemical vapor deposition |
| FIB | focused ion beam |
| FIM | field ion microscope |
| FIP | feline coronavirus |
| FKT | Frenkel–Kontorova–Tomlinson |
| FM | frequency modulation |
| FMEA | failure-mode effect analysis |
| FP6 | Sixth Framework Program |
| FP | fluorescence polarization |
| FPR | N-formyl peptide receptor |
| FS | force spectroscopy |
| FTIR | Fourier-transform infrared |
| FV | force–volume |
G
| GABA | γ -aminobutyric acid |
| GDP | guanosine diphosphate |
| GF | gauge factor |
| GFP | green fluorescent protein |
| GMR | giant magnetoresistive |
| GOD | glucose oxidase |
| GPCR | G-protein coupled receptor |
| GPS | global positioning system |
| GSED | gaseous secondary-electron detector |
| GTP | guanosine triphosphate |
| GW | Greenwood and Williamson |
H
| HAR | high aspect ratio |
| HARMEMS | high-aspect-ratio MEMS |
| HARPSS | high-aspect-ratio combined poly- and single-crystal silicon |
| HBM | human body model |
| hcp | hexagonal close-packed |
| HDD | hard-disk drive |
| HDT | hexadecanethiol |
| HDTV | high-definition television |
| HEK | human embryonic kidney 293 |
| HEL | hot embossing lithography |
| HEXSIL | hexagonal honeycomb polysilicon |
| HF | hydrofluoric |
| HMDS | hexamethyldisilazane |
| HNA | hydrofluoric-nitric-acetic |
| HOMO | highest occupied molecular orbital |
| HOP | highly oriented pyrolytic |
| HOPG | highly oriented pyrolytic graphite |
| HOT | holographic optical tweezer |
| HP | hot-pressing |
| HPI | hexagonally packed intermediate |
| HRTEM | high-resolution transmission electron microscope |
| HSA | human serum albumin |
| HtBDC | hexa-tert-butyl-decacyclene |
| HTCS | high-temperature superconductivity |
| HTS | high throughput screening |
| HUVEC | human umbilical venous endothelial cell |
I
| IBD | ion beam deposition |
| IC | integrated circuit |
| ICA | independent component analysis |
| ICAM-1 | intercellular adhesion molecules 1 |
| ICAM-2 | intercellular adhesion molecules 2 |
| ICT | information and communication technology |
| IDA | interdigitated array |
| IF | intermediate filament |
| IF | intermediate-frequency |
| IFN | interferon |
| IgG | immunoglobulin G |
| IKVAV | isoleucine–lysine–valine–alanine–valine |
| IL | ionic liquid |
| IMAC | immobilized metal ion affinity chromatography |
| IMEC | Interuniversity MicroElectronics Center |
| IR | infrared |
| ISE | indentation size effect |
| ITO | indium tin oxide |
| ITRS | International Technology Roadmap for Semiconductors |
| IWGN | Interagency Working Group on Nanoscience, Engineering, and Technology |
J
| JC | jump-to-contact |
| JFIL | jet-and-flash imprint lithography |
| JKR | Johnson–Kendall–Roberts |
K
| KASH | Klarsicht, ANC-1, Syne Homology |
| KPFM | Kelvin probe force microscopy |
L
| LA | lauric acid |
| LAR | low aspect ratio |
| LB | Langmuir–Blodgett |
| LBL | layer-by-layer |
| LCC | leadless chip carrier |
| LCD | liquid-crystal display |
| LCoS | liquid crystal on silicon |
| LCP | liquid-crystal polymer |
| LDL | low-density lipoprotein |
| LDOS | local density of states |
| LED | light-emitting diode |
| LFA-1 | leukocyte function-associated antigen-1 |
| LFM | lateral force microscope |
| LFM | lateral force microscopy |
| LIGA | Lithographie Galvanoformung Abformung |
| LJ | Lennard-Jones |
| LMD | laser microdissection |
| LMPC | laser microdissection and pressure catapulting |
| LN | liquid-nitrogen |
| LoD | limit-of-detection |
| LOR | lift-off resist |
| LPC | laser pressure catapulting |
| LPCVD | low-pressure chemical vapor deposition |
| LSC | laser scanning cytometry |
| LSN | low-stress silicon nitride |
| LT-SFM | low-temperature scanning force microscope |
| LT-SPM | low-temperature scanning probe microscopy |
| LT-STM | low-temperature scanning tunneling microscope |
| LT | low-temperature |
| LTM | laser tracking microrheology |
| LTO | low-temperature oxide |
| LTRS | laser tweezers Raman spectroscopy |
| LUMO | lowest unoccupied molecular orbital |
| LVDT | linear variable differential transformer |
M
| MALDI | matrix assisted laser desorption ionization |
| MAP | manifold absolute pressure |
| MAPK | mitogen-activated protein kinase |
| MBE | molecular-beam epitaxy |
| MC | microcantilever |
| MC | microcapillary |
| MCM | multi-chip module |
| MD | molecular dynamics |
| ME | metal-evaporated |
| MEMS | microelectromechanical system |
| MExFM | magnetic exchange force microscopy |
| MFM | magnetic field microscopy |
| MFM | magnetic force microscope |
| MFM | magnetic force microscopy |
| MHD | magnetohydrodynamic |
| MIM | metal–insulator–metal |
| MIMIC | micromolding in capillaries |
| MLE | maximum likelihood estimator |
| MOCVD | metalorganic chemical vapor deposition |
| MOEMS | microoptoelectromechanical system |
| MOS | metal–oxide–semiconductor |
| MOSFET | metal–oxide–semiconductor field-effect transistor |
| MP | metal particle |
| MPTMS | mercaptopropyltrimethoxysilane |
| MRFM | magnetic resonance force microscopy |
| MRFM | molecular recognition force microscopy |
| MRI | magnetic resonance imaging |
| MRP | molecular recognition phase |
| MscL | mechanosensitive channel of large conductance |
| MST | microsystem technology |
| MT | microtubule |
| mTAS | micro total analysis system |
| MTTF | mean time to failure |
| MUMP | multiuser MEMS process |
| MVD | molecular vapor deposition |
| MWCNT | multiwall carbon nanotube |
| MWNT | multiwall nanotube |
| MYD/BHW | Muller–Yushchenko–Derjaguin/Burgess– Hughes–White |
N
| NA | numerical aperture |
| NADIS | nanoscale dispensing |
| NASA | National Aeronautics and Space Administration |
| NC-AFM | noncontact atomic force microscopy |
| NEMS | nanoelectromechanical system |
| NGL | next-generation lithography |
| NHS | N-hydroxysuccinimidyl |
| NIH | National Institute of Health |
| NIL | nanoimprint lithography |
| NIST | National Institute of Standards and Technology |
| NMP | no-moving-part |
| NMR | nuclear magnetic resonance |
| NMR | nuclear mass resonance |
| NNI | National Nanotechnology Initiative |
| NOEMS | nanooptoelectromechanical system |
| NP | nanoparticle |
| NP | nanoprobe |
| NSF | National Science Foundation |
| NSOM | near-field scanning optical microscopy |
| NSTC | National Science and Technology Council |
| NTA | nitrilotriacetate |
| nTP | nanotransfer printing |
O
| ODA | octadecylamine |
| ODDMS | n-octadecyldimethyl(dimethylamino)silane |
| ODMS | n-octyldimethyl(dimethylamino)silane |
| ODP | octadecylphosphonate |
| ODTS | octadecyltrichlorosilane |
| OLED | organic light-emitting device |
| OM | optical microscope |
| OMVPE | organometallic vapor-phase epitaxy |
| OS | optical stretcher |
| OT | optical tweezers |
| OTRS | optical tweezers Raman spectroscopy |
| OTS | octadecyltrichlorosilane |
| oxLDL | oxidized low-density lipoprotein |
P
| P–V | peak-to-valley |
| PAA | poly(acrylic acid) |
| PAA | porous anodic alumina |
| PAH | poly(allylamine hydrochloride) |
| PAPP | p-aminophenyl phosphate |
| Pax | paxillin |
| PBC | periodic boundary condition |
| PBS | phosphate-buffered saline |
| PC | polycarbonate |
| PCB | printed circuit board |
| PCL | polycaprolactone |
| PCR | polymerase chain reaction |
| PDA | personal digital assistant |
| PDMS | polydimethylsiloxane |
| PDP | 2-pyridyldithiopropionyl |
| PDP | pyridyldithiopropionate |
| PE | polyethylene |
| PECVD | plasma-enhanced chemical vapor deposition |
| PEEK | polyetheretherketone |
| PEG | polyethylene glycol |
| PEI | polyethyleneimine |
| PEN | polyethylene naphthalate |
| PES | photoemission spectroscopy |
| PES | position error signal |
| PET | poly(ethyleneterephthalate) |
| PETN | pentaerythritol tetranitrate |
| PFDA | perfluorodecanoic acid |
| PFDP | perfluorodecylphosphonate |
| PFDTES | perfluorodecyltriethoxysilane |
| PFM | photonic force microscope |
| PFOS | perfluorooctanesulfonate |
| PFPE | perfluoropolyether |
| PFTS | perfluorodecyltricholorosilane |
| PhC | photonic crystal |
| PI3K | phosphatidylinositol-3-kinase |
| PI | polyisoprene |
| PID | proportional–integral–differential |
| PKA | protein kinase |
| PKC | protein kinase C |
| PKI | protein kinase inhibitor |
| PL | photolithography |
| PLC | phospholipase C |
| PLD | pulsed laser deposition |
| PMAA | poly(methacrylic acid) |
| PML | promyelocytic leukemia |
| PMMA | poly(methyl methacrylate) |
| POCT | point-of-care testing |
| POM | polyoxy-methylene |
| PP | polypropylene |
| PPD | p-phenylenediamine |
| PPMA | poly(propyl methacrylate) |
| PPy | polypyrrole |
| PS-PDMS | poly(styrene-b-dimethylsiloxane) |
| PS/clay | polystyrene/nanoclay composite |
| PS | polystyrene |
| PSA | prostate-specific antigen |
| PSD | position-sensitive detector |
| PSD | position-sensitive diode |
| PSD | power-spectral density |
| PSG | phosphosilicate glass |
| PSGL-1 | P-selectin glycoprotein ligand-1 |
| PTFE | polytetrafluoroethylene |
| PUA | polyurethane acrylate |
| PUR | polyurethane |
| PVA | polyvinyl alcohol |
| PVD | physical vapor deposition |
| PVDC | polyvinylidene chloride |
| PVDF | polyvinyledene fluoride |
| PVS | polyvinylsiloxane |
| PWR | plasmon-waveguide resonance |
| PZT | lead zirconate titanate |
Q
| QB | quantum box |
| QCM | quartz crystal microbalance |
| QFN | quad flat no-lead |
| QPD | quadrant photodiode |
| QWR | quantum wire |
R
| RBC | red blood cell |
| RCA | Radio Corporation of America |
| RF | radiofrequency |
| RFID | radiofrequency identification |
| RGD | arginine–glycine–aspartic |
| RH | relative humidity |
| RHEED | reflection high-energy electron diffraction |
| RICM | reflection interference contrast microscopy |
| RIE | reactive-ion etching |
| RKKY | Ruderman–Kittel–Kasuya–Yoshida |
| RMS | root mean square |
| RNA | ribonucleic acid |
| ROS | reactive oxygen species |
| RPC | reverse phase column |
| RPM | revolutions per minute |
| RSA | random sequential adsorption |
| RT | room temperature |
| RTP | rapid thermal processing |
S
| SAE | specific adhesion energy |
| SAM | scanning acoustic microscopy |
| SAM | self-assembled monolayer |
| SARS-CoV | syndrome associated coronavirus |
| SATI | self-assembly, transfer, and integration |
| SATP | (S-acetylthio)propionate |
| SAW | surface acoustic wave |
| SB | Schottky barrier |
| SCFv | single-chain fragment variable |
| SCM | scanning capacitance microscopy |
| SCPM | scanning chemical potential microscopy |
| SCREAM | single-crystal reactive etching and metallization |
| SDA | scratch drive actuator |
| SEcM | scanning electrochemical microscopy |
| SEFM | scanning electrostatic force microscopy |
| SEM | scanning electron microscope |
| SEM | scanning electron microscopy |
| SFA | surface forces apparatus |
| SFAM | scanning force acoustic microscopy |
| SFD | shear flow detachmen |
| SFIL | step and flash imprint lithography |
| SFM | scanning force microscope |
| SFM | scanning force microscopy |
| SGS | small-gap semiconducting |
| SICM | scanning ion conductance microscopy |
| SIM | scanning ion microscope |
| SIP | single inline package |
| SKPM | scanning Kelvin probe microscopy |
| SL | soft lithography |
| SLIGA | sacrificial LIGA |
| SLL | sacrificial layer lithography |
| SLM | spatial light modulator |
| SMA | shape memory alloy |
| SMM | scanning magnetic microscopy |
| SNOM | scanning near field optical microscopy |
| SNP | single nucleotide polymorphisms |
| SNR | signal-to-noise ratio |
| SOG | spin-on-glass |
| SOI | silicon-on-insulator |
| SOIC | small outline integrated circuit |
| SoS | silicon-on-sapphire |
| SP-STM | spin-polarized STM |
| SPM | scanning probe microscope |
| SPM | scanning probe microscopy |
| SPR | surface plasmon resonance |
| sPROM | structurally programmable microfluidic system |
| SPS | spark plasma sintering |
| SRAM | static random access memory |
| SRC | sampling rate converter |
| SSIL | step-and-stamp imprint lithography |
| SSRM | scanning spreading resistance microscopy |
| STED | stimulated emission depletion |
| SThM | scanning thermal microscope |
| STM | scanning tunneling microscope |
| STM | scanning tunneling microscopy |
| STORM | statistical optical reconstruction microscopy |
| STP | standard temperature and pressure |
| STS | scanning tunneling spectroscopy |
| SUN | Sad1p/UNC-84 |
| SWCNT | single-wall carbon nanotube |
| SWCNT | single-walled carbon nanotube |
| SWNT | single wall nanotube |
T
| TA | tilt angle |
| TASA | template-assisted self-assembly |
| TCM | tetracysteine motif |
| TCNQ | tetracyanoquinodimethane |
| TCP | tricresyl phosphate |
| TEM | transmission electron microscope |
| TEM | transmission electron microscopy |
| TESP | tapping mode etched silicon probe |
| TGA | thermogravimetric analysis |
| TI | Texas Instruments |
| TIRF | total internal reflection fluorescence |
| TIRM | total internal reflection microscopy |
| TLP | transmission-line pulse |
| TM | tapping mode |
| TMAH | tetramethyl ammonium hydroxide |
| TMR | tetramethylrhodamine |
| TMS | tetramethylsilane |
| TMS | trimethylsilyl |
| TNT | trinitrotoluene |
| TP | track pitch |
| TPE-FCCS | two-photon excitation fluorescence cross-correlation spectroscopy |
| TPI | threads per inch |
| TPMS | tire pressure monitoring system |
| TR | torsional resonance |
| TREC | topography and recognition |
| TRIM | transport of ions in matter |
| TSDC | thermally stimulated depola |
| TTF | tetrathiafulvalene |
| TV | television |
U
| UAA | unnatural AA |
| UHV | ultrahigh vacuum |
| ULSI | ultralarge-scale integration |
| UML | unified modeling language |
| UNCD | ultrananocrystalline diamond |
| UV | ultraviolet |
| UVA | ultraviolet A |
V
| VBS | vinculin binding site |
| VCO | voltage-controlled oscillator |
| VCSEL | vertical-cavity surface-emitting laser |
| vdW | van der Waals |
| VHH | variable heavy–heavy |
| VLSI | very large-scale integration |
| VOC | volatile organic compound |
| VPE | vapor-phase epitaxy |
| VSC | vehicle stability control |
X
| XPS | x-ray photon spectroscopy |
| XRD | x-ray powder diffraction |
Y
| YFP | yellow fluorescent protein |
Z
| Z-DOL | perfluoropolyether |